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7. Damage accumulation model
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6. Basic of critical angle for channeling ion implantation
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5. Analysis of ion implantation phenomenon by 2-body scattering model
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4. Basics of channeling ion implantation
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3. Ion Implantation into beta-Gallium Oxide
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2. Ion Implantation into Gallium Nitride
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1. Ion implantation phenomena by binary collision approximation
Scientific Article
[19 Aug 2025] Paper published in Japanese Journal of Applied Physics (JJAP).
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Poster Presentation at the 15th International Conference on Nitride Semiconductors (ICNS-15)
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Automotive Engineering Exposition 2024 NAGOYA
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Notice of price revision
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【Overseas corporation】ITC KOREA
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